Separation module

ABSTRACT

A separation module is provided having a housing, a filter within the housing and at least one outlet and one inlet. The outlet and inlet are positioned to mate with fittings of a pump housing. A stationary receptor positioned between the pump housing and the separation module has a pivot line and two shelves on its outer surface which permit fitting the separation module in a stationary receptor adjacent the pump housing.

This application claims the benefit of PCT/US02/29107, filed 13 Sep.2002, which claims priority to U.S. provisional application 60/332,002,filed on 23 Nov. 2001.

BACKGROUND OF THE INVENTION

This invention relates to a separation module for purifying a fluid.Fluid separation devices having an easily replaceable and disposablefluid separation module have been used to control contamination inindustrial processes for many years. Such devices are an integral partof the manufacture of many products including pharmaceuticals, foodstuffs and beverages. However, nowhere is the need for effectivecontamination control greater than in the semiconductor fabricationindustry. With circuit details in the submicron range and with furtherfeature size reductions inevitable, the need for control of particulate,ionic, organic and other contaminants in the semiconductor processfluids is essential. Also, because semiconductor devices are fabricatedin clean rooms, it is important to minimize the potential ofcontaminating the manufacturing environment. For this reason, disposablefluid separation devices are preferable in semiconductor fabricationprocesses in order to minimize contamination of the process lines aswell as the clean room.

Examples of semiconductor process fluids which are processed at thepoint of use (POU) include those chemicals used in photolithographicprocessing (photochemicals). Photochemicals include materials such asprimers, adhesion promoters, photoresists, edge bead removers,antireflective coatings, developers, dielectrics, and the like. Suchchemicals are commonly dispensed onto the silicon wafer by a specializedpump and subsequently dispersed into a uniform thin film using a processcalled spin coating. The purity of these chemicals at the POU isessential to producing acceptable product yields.

Fluid separation devices are in general of two types. In the first type,the separation element such as a filter is a replaceable component,while the pressure vessel which houses the element, i.e., the housing,is reusable. The housing also contains appropriate fluid connections tothe rest of the fluid processing system. Replacing the fluid separationelement requires opening the housing, removing the separation element,installing the replacement separation element into the housing andclosing the housing. There are many disadvantages to this type of fluidseparation device. First, the replacement operation is time consuming,especially if access to the housing is restricted. Secondly, because thehousing contains a quantity of the fluid being processed and because thefluid separation element is usually saturated with the fluid, spillageof the fluid usually occurs. In the case of the hazardous fluids, spillscan be a threat to the well-being of personnel in the area as well aspotentially damaging to nearby equipment and facilities. Finally, theopening of the housing exposes the internal surfaces of the fluidprocessing system to unwanted contamination from the surroundingenvironment.

The second type of separation device is one in which the separationelement is permanently attached to the housing, which also containsappropriate fluid connections to the rest of the fluid processingsystem, to form an integrated module. In this case, replacement involvesdisconnecting the entire separation module from the fluid processingsystem and reconnecting a replacement module to the system. In thismanner, replacement is easier, exposure of the operator to hazardouschemicals is minimized and the reliability of the connection issignificantly improved. The type of separation device is referred to asa disposable module, since the whole module is removed and disposed ofwhenever the separation element requires replacement regardless of whatconnector design is employed. Disposable modules usually require thatmultiple connections be made sequentially, a minimum of two connections,and more typically three or four. Threaded fasteners are cumbersome andsometimes difficult to engage; factors which involve the subsequentconsumption of additional time and effort. Furthermore, the module hasto be held in place while the connections are being made, which makesthe connection event even more difficult since it requires performingtwo actions at the same time (i.e., holding the module in place andattaching each connector sequentially). Finally, in those applicationsin which the permanent connections to the fluid processing system arenot rigid, as for example, when flexible tubing is used, liquid has atendency to be discharged as the connections disengage. All of theseproblems exacerbate the time and effort required to replace a disposablemodule, in addition to still allowing for exposure of personnel tohazardous materials, and contamination of the manufacturing environment.

For these reasons, some disposable separation modules have been designedwith features that allow them to be connected quickly and easily to thefluid processing system in a “quick-connect” fashion. These types ofquick-connect modules provide for a set of connectors that sealinglyengage with a single, simple stroke or action, to a mating set ofconnectors attached to a reusable substrate. Different types ofmechanisms have been designed to accomplish quick-connect retention, allof which heretofore have required some form of relative motion betweenthe male connector and its female counterpart, most commonly a twistingaction.

It has also been proposed to provide a separation module in a system fordispensing a filtered fluid composition wherein the separation module isintroduced into a pivotable housing to effect a desired connection. Thepivotable housing is expensive and is subjected to breakage over timedue to excessive use.

Accordingly, it would be desirable to provide a separation module whichcan be replaced in a fluid separation system without the need of apivotable housing.

SUMMARY OF THE INVENTION

The separation module of this invention fits into a stationary receptorhaving a shelf which functions as a pivot line and a slot which receivesand retains a latch of the separation module. The separation moduleincludes a curved surface which fits onto the pivot line of thestationary receptor and a latch which cooperates with the slot of thestationary receptor to retain the separation module within thestationary receptor. The separation module includes a filter positionedwithin a housing of the separation module and fittings which connect asource of fluid to be purified to a point of use for the fluid beingpurified within the separation module. In one embodiment, the separationmodule is positioned in a portable manifold having fluid fittings whichpermit the use of the separation module in fluid transfer systems havinga variety of functions.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of a separation module of this invention.

FIG. 2 is a perspective view of a stationary receptor utilized inconjunction with the separation module of FIG. 1.

FIGS. 3 a, 3 b, 3 c and 3 d are side view illustrating the use of alatch of the separation module of FIG. 1.

FIG. 4 is a side view of the separation module of FIG. 1 in thestationary receptor of FIG. 2.

FIG. 5 is a perspective view of the apparatus of FIG. 4 attached to apump housing.

FIG. 6 illustrates an alternative separation module of this invention.

FIG. 7 illustrates an alternative separation module of this invention.

FIG. 8 is a perspective view of a portable stationary module andseparation module of this invention.

DESCRIPTION OF SPECIFIC EMBODIMENTS

The separation module of this invention is useful for purifying a fluidfrom a fluid dispensing system which includes a pump. The fluiddispensing system can includes a single pump or a plurality of pumpssuch as a two pump system comprising a dispensing pump and a feed pump.Such a system, when dispensing a fluid, includes the separation moduleof this invention having a separation element which separates unwantedcomponents of the fluid from the desired fluid composition.

The present invention will be particularly described herein withreference to a two pump fluid dispensing system including a feed pump, adispensing pump and a separation module having a particularconfiguration of inlet means and outlet means. However, it is to beunderstood that the present invention can be utilized in a fluiddispensing system having a separation module regardless of the outersurface configuration of inlet means and outlet means on the surface ofthe separation module.

Referring to FIG. 1, the separation module 10 of this invention includesa housing 12 for a filter construction such as a pleated filter, a depthfilter, hollow fibers or the like. Ports 14, 16 and 18 fit over matingfittings 15, 17 and 19 (FIG. 4). Housing 66 (FIG. 5) which contains afeed pump and a dispense pump such as that disclosed in U.S. Pat. No.5,263,069 which is incorporated herein by reference. Port 14 can be aninlet for fluid to be filtered. Port 16 can be an outlet for retentate.Port 18 can be an outlet for filtered fluid directed to a point of use.The separation module 10 includes a pivot surface 20 which extendssubstantially the complete width of the separation module 10 and twoflanges 22 (one shown) which are positioned on opposing surfaces of theseparation module 10 and which are attached to walls 24 and 26.

The separation module 10 is provided with a latch 31 having a verticalarm 32, a hook 33 and a lever 35. The latch 31 is secured to theseparator module 10 such as by being molded with the walls of slot 37.The slot 37 permits movement of latch 31 when a force is applied tolever 35, such as manual force.

Referring to FIG. 2, the stationary receptor 36 includes a top surface38 having holes 40, 42 and 44 through which fittings 15, 17 and 19 (FIG.4) from a manifold extend. The stationary receptor 36 includes a flange46 having an opening 47 which cooperates with vertical arm 32 and hook33 of latch 31. The stationary receptor 36 also includes shelves 50 and52 onto which flanges 22 of separation module 10 slide, as well asreceptor pivot surface 54 onto which pivot surface 20 fits.

Referring to FIGS. 3 a, 3 b, 3 c and 3 d, the latch 31 in its initialposition is shown in FIG. 3 a. As shown in FIG. 3 b, a force in thedirection of the arrow causes hook 33 to move away from flange 46. Asshown in FIG. 3 c, the latch 31 is moved upwardly by moving filtratemodule 10 upwardly so that hook 33 fits onto flange 46. This latchposition fixes the filtration module 10 to stationary module 36. Asshown in FIG. 3 d, the hook 33 is removed from flange 46 by applying aforce to lever 35 as shown by the arrow. When latch 31 in the positionshown in FIG. 3 d, separation module 10 can be removed from stationaryreceptor 36.

As shown in FIGS. 2 and 4, separation module 10 is slid into stationaryreceptor 36 onto slides 50 and 52 until pivot line 20 is positioned onpivot surface 54. When separation module 10 is so positioned, ports 14,16 and 18 are positioned to fit over fittings 15, 17 and 19 whenseparation module 10 is rotated upwardly as indicated by arrow 55. Byvirtue of this upward movement, arm 32 is locked onto flange 46 and hook33 extends through opening 47. This, in turn, locks separation module 10into stationary receptor 36 so that leak-free fluid transfer can beaffected between ports 14, 16 and 18 and fittings 15, 17 and 19.

As shown in FIG. 5, the stationary receptor 36 is attached to a pumphousing containing one or a plurality of pumps in a manner well known inthe art. The fittings 14, 16 and 18 are sealed to mating fittings suchas described above.

As shown in FIG. 6, the separation module 10 can be provided with alatch 28 comprising two arms 30 and 31. Arm 31 is provided with lip 34which cooperates with the bracket of FIG. 2 as described below. The arms30 and 31 are sufficiently flexible so that the arm 31 can be pushed byarm 30, which in turn, is pushed manually sequentially in order toengage or remove arm 31 from contact with flange 46 of bracket 36 andthereby to permit removal of separation module 10 from bracket 36.

An alternative embodiment of a separation module of this invention isshown in FIG. 7. The separation module 10 a having ports 14 a, 16 a, and18 a also is provided with two shelves 22 and a pivot line 20 in themanner described above with reference to FIG. 1. The latch 70 includes alip 72 and an arm 74. The lip 72 is configured to fit into a stationaryreceptor and the lever 74 permits application of manual force in orderto remove lip 72 from the stationary receptor thereby to install andremove the separation module 10 a from the stationary receptor in themanner described above with reference to FIGS. 3 a–3 d.

Referring to FIG. 8, an embodiment of this invention is illustratedwhich comprises a portable unit of a separation module 76 and thestationary receptor 78 that is portable. The separation module 76 andstationary receptor 78 are joined by latch 31 in the manner describedabove with reference to FIGS. 3 a–3 d. The stationary receptor 78 isprovided with fittings 80, 82 and 84 which can be mated with a pumpingapparatus (not shown). The stationary receptor 78 is joined to amounting 88 that can be mounted to a wall 90 by a latch 92. Thisembodiment facilitates installation of stationary receptor 78. Thestationary receptor 78 can include a valve 81 having a manuallyactivated apparatus lever 83 for opening or closing the valve 81 topermit or prevent fluid transfer through fittings.

1. A separation module configured to be locked and unlocked from areceptor having complementary fluid connectors, the module comprising: ahousing comprising a latch molded to the housing, a plurality of flangesmolded to the housing, and a pivot surface molded to the housing; afluid inlet and outlet exclusive of each other and located on one end ofthe housing; and a separation element within the housing in fluidcommunication with the inlet and outlet; wherein the latch supports saidhousing when said housing is in a locked position such that said inletand outlet are in fluid communication with said complementary fluidconnectors; and wherein the plurality of flanges are positioned tosupport the housing as the separation module is slid into the receptorto bring the pivot surface of the housing into contact with a pivotsurface of the receptor prior to pivoting the separation module into alocked position; and wherein the fluid inlet and outlet are positionedto be sealed in fluid communication with mating fittings of the receptorwhen the separation module is pivoted into the locked position.
 2. Theseparation module of claim 1 further comprising a lever to which forcecan be applied to move said latch.
 3. The separation module of claim 1further comprising a third fluid connector.
 4. The separation module ofclaim 3, wherein the third fluid connector is a vent.
 5. The separationmodule of claim 3, wherein the third fluid connector is parallel to theinlet and outlet.
 6. The separation module of claim 1, wherein the fluidinlet and outlet are parallel.
 7. The combination of a separation moduleand a receptor, the combination comprising: a housing of the separationmodule, the housing comprising a latch molded to the housing, aplurality of flanges molded to the housing, and a pivot surface moldedto the housing; an opening in the receptor for receiving the latch ofthe housing when the combination is in a locked position; and aplurality of surfaces of the receptor positioned to support theplurality of flanges of the housing as the separation module is slidinto the receptor to bring the pivot surface of the housing into contactwith a pivot surface of the receptor prior to pivoting the separationmodule into the locked position; wherein a plurality of ports of theseparation module are positioned to be sealed in fluid communicationwith mating fittings of the receptor when the separation module ispivoted into the locked position.